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Antireflection layers and planarization for microlithography
Mark W. Horn
Engineering Science and Mechanics
Materials Research Institute (MRI)
Research output
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Contribution to specialist publication
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Article
17
Scopus citations
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Dive into the research topics of 'Antireflection layers and planarization for microlithography'. Together they form a unique fingerprint.
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Material Science
Antireflection Coating
100%
Lithography
50%
Keyphrases
Microlithography
100%
Exposure Field
25%
Engineering
Microlithography
100%