Application of MEMS-based x-ray optics as tuneable nanosecond choppers

Pice Chen, Donald A. Walko, Il Woong Jung, Zhilong Li, Ya Gao, Gopal K. Shenoy, Daniel Lopez, Jin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Time-resolved synchrotron x-ray measurements often rely on using a mechanical chopper to isolate a set of x-ray pulses. We have started the development of micro electromechanical systems (MEMS)-based x-ray optics, as an alternate method to manipulate x-ray beams. In the application of x-ray pulse isolation, we recently achieved a pulse-picking time window of half a nanosecond, which is more than 100 times faster than mechanical choppers can achieve. The MEMS device consists of a comb-drive silicon micromirror, designed for efficiently diffracting an x-ray beam during oscillation. The MEMS devices were operated in Bragg geometry and their oscillation was synchronized to x-ray pulses, with a frequency matching subharmonics of the cycling frequency of x-ray pulses. The microscale structure of the silicon mirror in terms of the curvature and the quality of crystallinity ensures a narrow angular spread of the Bragg reflection. With the discussion of factors determining the diffractive time window, this report showed our approaches to narrow down the time window to half a nanosecond. The short diffractive time window will allow us to select single x-ray pulse out of a train of pulses from synchrotron radiation facilities.

Original languageEnglish (US)
Title of host publicationAdvances in X-Ray/EUV Optics and Components XII
EditorsChristian Morawe, Ali M. Khounsary, Shunji Goto
ISBN (Electronic)9781510612297
StatePublished - 2017
EventAdvances in X-Ray/EUV Optics and Components XII 2017 - San Diego, United States
Duration: Aug 8 2017Aug 9 2017

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceAdvances in X-Ray/EUV Optics and Components XII 2017
Country/TerritoryUnited States
CitySan Diego

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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