TY - JOUR
T1 - Application of Micromachined y -cut-quartz bulk acoustic wave resonator for infrared sensing
AU - Pisani, Marcelo B.
AU - Ren, Kailiang
AU - Kao, Ping
AU - Tadigadapa, Srinivas
N1 - Funding Information:
Manuscript received July 16, 2010; revised October 24, 2010; accepted November 16, 2010. Date of publication January 14, 2011; date of current version February 2, 2011. This work was supported in part by the U.S. Army Research Office under Grant W911NF-07-1-0327 and in part by the National Science Foundation (NSF) under Grant ECCS 0925438. The use of facilities at the PSU Site of the NSF National Nanotechnology Infrastructure Network (NNIN) under Agreement 0335765 is acknowledged. Subject Editor A. Seshia.
PY - 2011/2
Y1 - 2011/2
N2 - This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y-cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y-cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHz/°C was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nW/Hz1/2, a detectivity Dof 1 × 10-5cmHz1/2W, and a noise equivalent temperature difference of 4 mK in the 8- to 14-μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined Y -cut-quartz resonators and their IR sensing response.
AB - This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y-cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y-cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHz/°C was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nW/Hz1/2, a detectivity Dof 1 × 10-5cmHz1/2W, and a noise equivalent temperature difference of 4 mK in the 8- to 14-μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined Y -cut-quartz resonators and their IR sensing response.
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U2 - 10.1109/JMEMS.2010.2100030
DO - 10.1109/JMEMS.2010.2100030
M3 - Article
AN - SCOPUS:79551589840
SN - 1057-7157
VL - 20
SP - 288
EP - 296
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 1
M1 - 5685833
ER -