Architectures from aligned nanotubes using controlled micropatterning of silicon substrates and electrochemical methods

The growth of multi-walled carbon nanotubes (MWCNTs) by pyrolyzing ferrocene toluene benzylamine solutions at 850°C on electrochemically HF-etched Si substrates, was investigated. Electrochemical techniques are used to control the growth of 2D and 3D nanostructure arrays on different substances, facilitating their integration in the fabrication of electronic devices. Scanning electron microscopy (SEM) images of patterns created on Si substrates fabricated using current densities of 3 mAcm^-2 and etching times of 333 s. An increase in the etching current density leads to an enhancement in the reaction rate, which helps to create more hydrogen bubbles. EDX spectroscopy was used to analyze the different etched substrates. Oxidation of the grown MWCNT microarrays was also performed to eliminate the possible amorphous carbon formed on the surfaces. Results show that the current densities can control the formation and morphology of the circular patterns of Si substrates.