Argon-ion implantation damage studies in silicon Schottky barriers using anodic oxidation/etching

Keyphrases

• Schottky Barrier 100%
• Si Surface 100%
• Damage Study 100%
• Anodic Oxidation 100%
• Argon Ions 100%
• Ion Implantation Damage 100%
• Low Temperature 50%
• Electrical Properties 50%
• Ar Ions 50%
• Metallization 50%
• Ion Implantation 50%
• Schottky 50%
• Schottky Diode 50%
• Ion Bombardment 50%
• Surface Layer 50%
• I-V Characteristics 50%
• Surface Barrier 50%
• Schottky Barrier Height 50%
• High-resolution Electron Microscopy 50%
• Ion Damage 50%

Material Science

• Silicon 100%
• Oxidation Reaction 100%
• Schottky Barrier 100%
• Ion Implantation 100%
• High-Resolution Transmission Electron Microscopy 50%
• Schottky Diode 50%
• Current-Voltage Characteristic 50%