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Atomic layer deposition of PbTiO3 and PbZrxTi1-xO3 films using metal alkyl and alkylamide precursors
Nick M. Sbrockey, Gary S. Tompa, Robert Lavelle, Kathleen A. Trumbull, Mark A. Fanton, David W. Snyder, Ronald G. Polcawich, Daniel M. Potrepka
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations