Abstract
The physical mechanisms underlying the surface based mass spectrometry techniques of atomic SIMS, MALDI and cluster SIMS are discussed along with the relation of the physics to the measured quantities. In particular, there are at least two types of motion resulting from cluster bombardment in SIMS. One scenario involves the individual atoms in the cluster initiating collision cascades similar to atomic bombardment. The second mechanism involves a mesoscale motion of the cluster as a whole. This mesoscale motion can induce an organized flow of the ejected material in a plume.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 6409-6412 |
| Number of pages | 4 |
| Journal | Applied Surface Science |
| Volume | 252 |
| Issue number | 19 |
| DOIs | |
| State | Published - Jul 30 2006 |
All Science Journal Classification (ASJC) codes
- General Chemistry
- Condensed Matter Physics
- General Physics and Astronomy
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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