Abstract
A micro instrument is developed to apply force on free standing cantilever samples with subμm thickness. The objective is to study the effect of small thickness on the strength of materials when subjected to bending. The instrument consists of a MEMS actuator, 2mm × 3mm in size, and 20μm deep. It is employed to study an annealed Al cantilever sample, 110nm thick, 2μm wide and 15μm long, fabricated by evaporation. The sample yields at 841M Pa during the first cycle of loading. It is then unloaded and reloaded, when yielding occurs at 1200M Pa. To the best of our knowledge, this is the first reported experiment on free standing submicron metal film subjected to bending.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 207-211 |
| Number of pages | 5 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 594 |
| State | Published - Dec 1 2000 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering