Boron-doped plasma enhanced chemical vapor deposition of ZnO thin films

Keyphrases

• ZnO Thin Films 100%
• Boron-doped ZnO 50%
• Hall Effect Measurement 50%
• Free Electron Concentration 50%
• Uniform Film 50%
• Low Toxicity 50%
• Doped ZnO Thin Films 50%
• Low Reactivity 50%
• Diethylzinc 50%
• Argon Gas 50%

Chemistry

• Liquid Film 100%
• Plasma Enhanced Chemical Vapor Deposition 100%
• Carbon Dioxide 66%
• Argon 33%
• Carbon Dioxide 33%
• Hall Effect 33%
• Free Electron 33%
• Diethylzinc 33%
• Visible Spectrum 33%

Chemical Engineering

• Plasma Enhanced Chemical Vapor Deposition 100%
• Carbon Dioxide 50%