Bridging nitrogen dangling bond centers and electron trapping in amorphous NH₃-nitrided and reoxidized nitrided oxide films

Keyphrases

• Nitrides 100%
• Electron Traps 100%
• Oxide Film 100%
• Dangling Bonds 100%
• Nitrided Oxide 100%
• Nitrogen Atom 50%
• Dielectric 50%
• Silicon Atom 50%
• Unpaired Electrons 50%
• Dielectric Film 50%
• Silicon Oxynitride (SiON) 50%
• Oxide Dielectrics 50%

Material Science

• Silicon 100%
• Amorphous Material 100%
• Oxide Film 100%
• Oxide Compound 50%
• Dielectric Material 50%
• Oxynitride 50%
• Dielectric Films 50%