TY - GEN
T1 - Bulk acoustic wave resonators for infrared detection applications
AU - Pisani, Marcelo B.
AU - Kao, P.
AU - Tadigadapa, Srinivas
PY - 2009
Y1 - 2009
N2 - This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 μm thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.
AB - This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 μm thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.
UR - https://www.scopus.com/pages/publications/71449124080
UR - https://www.scopus.com/pages/publications/71449124080#tab=citedBy
U2 - 10.1109/SENSOR.2009.5285674
DO - 10.1109/SENSOR.2009.5285674
M3 - Conference contribution
AN - SCOPUS:71449124080
SN - 9781424441938
T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1959
EP - 1962
BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Y2 - 21 June 2009 through 25 June 2009
ER -