TY - JOUR
T1 - Calibration-based phase-shifting projected fringe profilometry for accurate absolute 3D surface profile measurement
AU - Liu, Hongyu
AU - Su, Wei Hung
AU - Reichard, Karl
AU - Yin, Shizhuo
N1 - Funding Information:
This work was performed under the support of the U.S. Department of Commerce, National Institute of Standards and Technology, Advanced Technology Program, Cooperative Agreement Number 70NANB7H3022. The authors are also grateful for support from the Institute for Manufacturing and Sustainment Technologies at The Pennsylvania State University’s Applied Research Laboratory. The Institute is a non-profit organization sponsored by the United States Navy Manufacturing Technology (MANTECH) Program, Office of Naval Research (contract number N00014-99-0005). Any opinions, findings, conclusions or recommendations expressed in this material are those of the authors and donot necessarily reflect the views of the U.S. Navy.
PY - 2003/2/1
Y1 - 2003/2/1
N2 - In this paper, an accurate calibration-based phase-shifting measurement technique for measuring the absolute 3D surface profiles is presented, in which the system distortions for each detection location are calibrated individually. Thus, this approach offers higher accuracy than that of conventional global system model-based calibration technique. By comparing the experimental results from this technique with the data from Zeiss Universal Precision Measuring Center (Model UPMC 550), it is found that the absolute measurement accuracy for a bowl size object (about 160 mm in diameter and 40 mm in depth) is about 5 μm. This experimental result proves that, indeed, this calibration-based phase-shifting measurement technique has a good enough accuracy for precise engineering surface (such as gear gauge surface) measurement.
AB - In this paper, an accurate calibration-based phase-shifting measurement technique for measuring the absolute 3D surface profiles is presented, in which the system distortions for each detection location are calibrated individually. Thus, this approach offers higher accuracy than that of conventional global system model-based calibration technique. By comparing the experimental results from this technique with the data from Zeiss Universal Precision Measuring Center (Model UPMC 550), it is found that the absolute measurement accuracy for a bowl size object (about 160 mm in diameter and 40 mm in depth) is about 5 μm. This experimental result proves that, indeed, this calibration-based phase-shifting measurement technique has a good enough accuracy for precise engineering surface (such as gear gauge surface) measurement.
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U2 - 10.1016/S0030-4018(02)02290-3
DO - 10.1016/S0030-4018(02)02290-3
M3 - Article
AN - SCOPUS:0037303145
SN - 0030-4018
VL - 216
SP - 65
EP - 80
JO - Optics Communications
JF - Optics Communications
IS - 1-3
ER -