Abstract
This paper deals with design and fabrication of a newly developed metal/ceramic composite ultrasonic motor. Inwardly directed arms at the inner circumference of metal ring, sandwiched between two uniformly poled piezoelectric ceramic rings, transfer radial vibration into torsional vibration. The stator vibrators, using different diameters (3.0, 5.0, 11.0 and 20.0 mm) and thickness of 0.5 mm piezoelectric ring, were fabricated and the characteristics of the motors were measured.
Original language | English (US) |
---|---|
Pages (from-to) | 687-690 |
Number of pages | 4 |
Journal | Proceedings of the IEEE Ultrasonics Symposium |
Volume | 1 |
State | Published - 1998 |
Event | Proceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn Duration: Oct 5 1998 → Oct 8 1998 |
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics