Chalcogenide glass thin films and planar waveguides

R. J. Curry; A. K. Mairaj; C. C. Huang; R. W. Eason; C. Grivas; D. W. Hewak; J. V. Badding

doi:10.1111/j.1551-2916.2005.00349.x

Chalcogenide glass thin films and planar waveguides

R. J. Curry, A. K. Mairaj, C. C. Huang, R. W. Eason, C. Grivas, D. W. Hewak, J. V. Badding

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Abstract

Over the past decade, we have carried out a comprehensive development program to produce high-purity Ga:La:S and Ge:S glasses and further process these glasses into thin films. In this paper, we discuss the general properties of these glass systems and the techniques used to obtain thin films. We demonstrate the ability to deposit high-quality films ranging in thickness from nanometers to several millimeters by several methods, including chemical vapor deposition technique, a technique not usually applied to chalcogenide glasses.

Original language	English (US)
Pages (from-to)	2451-2455
Number of pages	5
Journal	Journal of the American Ceramic Society
Volume	88
Issue number	9
DOIs	https://doi.org/10.1111/j.1551-2916.2005.00349.x
State	Published - Sep 2005

All Science Journal Classification (ASJC) codes

Ceramics and Composites
Materials Chemistry

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10.1111/j.1551-2916.2005.00349.x

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AU - Mairaj, A. K.

AU - Huang, C. C.

AU - Eason, R. W.

AU - Grivas, C.

AU - Hewak, D. W.

AU - Badding, J. V.

PY - 2005/9

Y1 - 2005/9

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AB - Over the past decade, we have carried out a comprehensive development program to produce high-purity Ga:La:S and Ge:S glasses and further process these glasses into thin films. In this paper, we discuss the general properties of these glass systems and the techniques used to obtain thin films. We demonstrate the ability to deposit high-quality films ranging in thickness from nanometers to several millimeters by several methods, including chemical vapor deposition technique, a technique not usually applied to chalcogenide glasses.

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Chalcogenide glass thin films and planar waveguides

Abstract

All Science Journal Classification (ASJC) codes

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