Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films

Joseph F. Shepard; Fan Chu; Isaku Kanno; Susan E. Trolier-McKinstry

doi:10.1063/1.370183

Characterization and aging response of the d₃₁ piezoelectric coefficient of lead zirconate titanate thin films

Joseph F. Shepard, Fan Chu, Isaku Kanno, Susan E. Trolier-McKinstry

Research output: Contribution to journal › Article › peer-review

123 Scopus citations

Abstract

The wafer flexure method was used to characterize the d₃₁ coefficients and monitor their aging rates for a number of 52/48 sol-gel and 50/50 rf sputtered PZT films. Aging results showed that the d₃₁ coefficient decreased in a linear fashion with the logarithm of time. The aging rates measured for the sol-gel films were found to be between 4% and 10% per decade with the thickest films tested displaying the smallest rates. Rates were measured at as much as 26% per decade when the sample was poled against the as-deposited polarization and a little as 2% per decade when poled in the preferential direction.

Original language	English (US)
Pages (from-to)	6711-6716
Number of pages	6
Journal	Journal of Applied Physics
Volume	85
Issue number	9
DOIs	https://doi.org/10.1063/1.370183
State	Published - May 1 1999

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.370183

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title = "Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films",

abstract = "The wafer flexure method was used to characterize the d31 coefficients and monitor their aging rates for a number of 52/48 sol-gel and 50/50 rf sputtered PZT films. Aging results showed that the d31 coefficient decreased in a linear fashion with the logarithm of time. The aging rates measured for the sol-gel films were found to be between 4% and 10% per decade with the thickest films tested displaying the smallest rates. Rates were measured at as much as 26% per decade when the sample was poled against the as-deposited polarization and a little as 2% per decade when poled in the preferential direction.",

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AU - Shepard, Joseph F.

AU - Chu, Fan

AU - Kanno, Isaku

AU - Trolier-McKinstry, Susan E.

PY - 1999/5/1

Y1 - 1999/5/1

N2 - The wafer flexure method was used to characterize the d31 coefficients and monitor their aging rates for a number of 52/48 sol-gel and 50/50 rf sputtered PZT films. Aging results showed that the d31 coefficient decreased in a linear fashion with the logarithm of time. The aging rates measured for the sol-gel films were found to be between 4% and 10% per decade with the thickest films tested displaying the smallest rates. Rates were measured at as much as 26% per decade when the sample was poled against the as-deposited polarization and a little as 2% per decade when poled in the preferential direction.

AB - The wafer flexure method was used to characterize the d31 coefficients and monitor their aging rates for a number of 52/48 sol-gel and 50/50 rf sputtered PZT films. Aging results showed that the d31 coefficient decreased in a linear fashion with the logarithm of time. The aging rates measured for the sol-gel films were found to be between 4% and 10% per decade with the thickest films tested displaying the smallest rates. Rates were measured at as much as 26% per decade when the sample was poled against the as-deposited polarization and a little as 2% per decade when poled in the preferential direction.

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Characterization and aging response of the d₃₁ piezoelectric coefficient of lead zirconate titanate thin films

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