Characterization of compositional heterogeneity in chemically amplified photoresist polymer thin films with infrared spectroscopy
- Shuhui Kang
- , Bryan D. Vogt
- , Wen Li Wu
- , Vivek M. Prabhu
- , David L. VanderHart
- , Ashwin Rao
- , Eric K. Lin
- , Karen Turnquest
Research output: Contribution to journal › Article › peer-review
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