TY - GEN
T1 - Characterization of Parylene-C using quartz thickness shear mode (TSM) resonators
AU - Wu, Huiyan
AU - Zu, Hongfei
AU - Li, Xiaotian
AU - Wang, Qing Ming
PY - 2013
Y1 - 2013
N2 - Due to its high sensitivity, repeatability and easy connection with electrical measurement systems, Quartz thickness-shear-mode (TSM) resonator is adopted to extract the complex shear modulus of Parylene-C films, which play an important role as both an effective wave-guiding layer and biocompatible interfacial layer in Shear-Horizontal Surface Acoustic Wave Device (SH-SAW, Love Mode). Parylene-C films of different thicknesses were deposited on the surface of AT-cut quartz TSM resonators, and admittance spectrums of these uncoated and coated TSM were measured by an impedance analyzer. Results indicated that the ideal thickness range for extraction was from 2.04 μm to 3.55 μm, effectively avoiding inadequate acoustic deformation as well as excessive electrical-response attenuation. The storage modulus G' and loss modulus G' of Parylene-C were 0.155±0.011 GPa and 4.78±0.44 GPa, respectively.
AB - Due to its high sensitivity, repeatability and easy connection with electrical measurement systems, Quartz thickness-shear-mode (TSM) resonator is adopted to extract the complex shear modulus of Parylene-C films, which play an important role as both an effective wave-guiding layer and biocompatible interfacial layer in Shear-Horizontal Surface Acoustic Wave Device (SH-SAW, Love Mode). Parylene-C films of different thicknesses were deposited on the surface of AT-cut quartz TSM resonators, and admittance spectrums of these uncoated and coated TSM were measured by an impedance analyzer. Results indicated that the ideal thickness range for extraction was from 2.04 μm to 3.55 μm, effectively avoiding inadequate acoustic deformation as well as excessive electrical-response attenuation. The storage modulus G' and loss modulus G' of Parylene-C were 0.155±0.011 GPa and 4.78±0.44 GPa, respectively.
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U2 - 10.1109/EFTF-IFC.2013.6702223
DO - 10.1109/EFTF-IFC.2013.6702223
M3 - Conference contribution
AN - SCOPUS:84893258118
SN - 9781479903429
T3 - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
SP - 787
EP - 790
BT - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
T2 - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Y2 - 21 July 2013 through 25 July 2013
ER -