Characterization of Si-N films prepared by reactive ion beam sputtering

M. D. Aggarwal, S Ashok, S. J. Fonash

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Characterization of Si-N films prepared by reactive ion beam sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy