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Charged particle detection: Potential of love wave acoustic devices
Michael Pedrick
, Bernhard R. Tittmann
Engineering Science and Mechanics
Materials Research Institute (MRI)
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Dive into the research topics of 'Charged particle detection: Potential of love wave acoustic devices'. Together they form a unique fingerprint.
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Keyphrases
Methyl
100%
Love Wave
100%
Acoustic Devices
100%
Material Properties
50%
Ion Fluence
50%
Layer Thickness
25%
Effective Alternative
25%
Acoustics
25%
Ion Implantation
25%
Semiconductors
25%
Group Velocity
25%
Ion Energy
25%
Density Change
25%
Velocity Shift
25%
Charged Particles
25%
Phase Velocity
25%
Sensitivity Method
25%
Experimental Validation
25%
Effective Density
25%
Scission
25%
Experimental Characterization
25%
Photoresist
25%
Ion Detection
25%
Film Density
25%
Mode Selection
25%
Ion Effect
25%
Engineering
Love Wave
100%
Layer Thickness
25%
Deposited Film
25%
Ion Energy
25%
Ion Implantation
25%
Phase Velocity
25%
Experimental Characterization
25%
Group Velocity
25%
Film Density
25%
Mode Selection
25%
Photoresist
25%
Density Change
25%
Material Science
Density
100%
Acoustic Device
100%
Film
66%
Materials Property
66%
Ion Implantation
33%
Physics
Love Wave
100%
Helium Ion
50%
Cleavage
25%
Cross-Link (Molecular Structure)
25%