Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids

Barbara J. Garrison; Robert J. Paruch; Zbigniew Postawa

doi:10.1016/j.nimb.2012.10.016

Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids

Barbara J. Garrison, Robert J. Paruch, Zbigniew Postawa

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4 Scopus citations

Abstract

Molecular dynamics simulations of repetitive bombardment of solids by keV cluster beams have generated so much data that easy interpretations are not possible. Moreover, although the MD simulations remove 3-4 nm of material, that is not sufficient material to determine a depth profile. The recently developed steady-state statistical sputtering model (SS-SSM) uses information from the MD simulations and incorporates it into a set of differential equations to predict a depth profile. In this study the distributions that provide the input to the SS-SSM are compared for simulations of 15 keV bombardment of Ag(111) by C ₆₀, Au₃ and Ar₈₇₂ cluster beams.

Original language	English (US)
Pages (from-to)	196-199
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	303
DOIs	https://doi.org/10.1016/j.nimb.2012.10.016
State	Published - 2013

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/j.nimb.2012.10.016

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title = "Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids",

abstract = "Molecular dynamics simulations of repetitive bombardment of solids by keV cluster beams have generated so much data that easy interpretations are not possible. Moreover, although the MD simulations remove 3-4 nm of material, that is not sufficient material to determine a depth profile. The recently developed steady-state statistical sputtering model (SS-SSM) uses information from the MD simulations and incorporates it into a set of differential equations to predict a depth profile. In this study the distributions that provide the input to the SS-SSM are compared for simulations of 15 keV bombardment of Ag(111) by C 60, Au3 and Ar872 cluster beams.",

author = "Garrison, {Barbara J.} and Paruch, {Robert J.} and Zbigniew Postawa",

year = "2013",

doi = "10.1016/j.nimb.2012.10.016",

language = "English (US)",

volume = "303",

pages = "196--199",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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T1 - Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids

AU - Garrison, Barbara J.

AU - Paruch, Robert J.

AU - Postawa, Zbigniew

PY - 2013

Y1 - 2013

N2 - Molecular dynamics simulations of repetitive bombardment of solids by keV cluster beams have generated so much data that easy interpretations are not possible. Moreover, although the MD simulations remove 3-4 nm of material, that is not sufficient material to determine a depth profile. The recently developed steady-state statistical sputtering model (SS-SSM) uses information from the MD simulations and incorporates it into a set of differential equations to predict a depth profile. In this study the distributions that provide the input to the SS-SSM are compared for simulations of 15 keV bombardment of Ag(111) by C 60, Au3 and Ar872 cluster beams.

AB - Molecular dynamics simulations of repetitive bombardment of solids by keV cluster beams have generated so much data that easy interpretations are not possible. Moreover, although the MD simulations remove 3-4 nm of material, that is not sufficient material to determine a depth profile. The recently developed steady-state statistical sputtering model (SS-SSM) uses information from the MD simulations and incorporates it into a set of differential equations to predict a depth profile. In this study the distributions that provide the input to the SS-SSM are compared for simulations of 15 keV bombardment of Ag(111) by C 60, Au3 and Ar872 cluster beams.

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids

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