TY - JOUR
T1 - Composition and morphological characteristics of chemically sprayed fluorine-doped zinc oxide thin films deposited on Si(1 0 0)
AU - Castañeda, L.
AU - Maldonado, A.
AU - Cheang-Wong, J. C.
AU - Terrones, M.
AU - de la, M.
N1 - Funding Information:
The authors acknowledge the help of J.C. Pineda, K. López, and F. J. Jaimes for the operation of the accelerators, and are also grateful with L. Baños, M.A. Canseco, and C. Flores, for their contribution in film characterization and fruitful discussion. The laboratory help of M.A. Luna-Arias and A. Palafox is also thanked. This work was partially supported by the CONACyT, through the contract number 42760. L. Castañeda also acknowledges financial support from the Universidad Iberoamericana and FICSAC.
PY - 2007/3/1
Y1 - 2007/3/1
N2 - Fluorine-doped zinc oxide thin films (ZnO:F) were deposited on Si(1 0 0) substrates by the chemical spray technique (CST) from an aged-solution. The effect of the substrate temperature on the morphology and composition of the ZnO:F thin films was studied. The films were polycrystalline, with a preferential growth along the ZnO (0 0 2) plane, irrespective of the deposition temperature. The average crystal size within the films was ca. 35 nm and the morphology of the surface was found to be dependent on the substrate temperature. At low substrate temperatures irregular-shaped grains were observed, whereas at higher temperatures uniform flat grains were obtained. Elemental analysis showed that the composition of the films is close to stoichiometric ZnO and that samples contain quite a low fluorine concentration, which decreases as a function of the deposition temperature.
AB - Fluorine-doped zinc oxide thin films (ZnO:F) were deposited on Si(1 0 0) substrates by the chemical spray technique (CST) from an aged-solution. The effect of the substrate temperature on the morphology and composition of the ZnO:F thin films was studied. The films were polycrystalline, with a preferential growth along the ZnO (0 0 2) plane, irrespective of the deposition temperature. The average crystal size within the films was ca. 35 nm and the morphology of the surface was found to be dependent on the substrate temperature. At low substrate temperatures irregular-shaped grains were observed, whereas at higher temperatures uniform flat grains were obtained. Elemental analysis showed that the composition of the films is close to stoichiometric ZnO and that samples contain quite a low fluorine concentration, which decreases as a function of the deposition temperature.
UR - http://www.scopus.com/inward/record.url?scp=33846236878&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33846236878&partnerID=8YFLogxK
U2 - 10.1016/j.physb.2006.07.020
DO - 10.1016/j.physb.2006.07.020
M3 - Article
AN - SCOPUS:33846236878
SN - 0921-4526
VL - 390
SP - 10
EP - 16
JO - Physica B: Condensed Matter
JF - Physica B: Condensed Matter
IS - 1-2
ER -