Computer modeling of angular emission from Ag(100) and Mo(100) surfaces due to Arn cluster bombardment

Dawid Maciazek, Michal Kanski, Lukasz Gaza, Barbara J. Garrison, Zbigniew Postawa

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9 Scopus citations


Molecular dynamics computer simulations are employed to investigate the effect of projectile size and surface morphology on the angular emission stimulated by impact of Ar gas cluster projectiles. Argon clusters of sizes n = 10-1000 and kinetic energies of 10 and 20 keV Arn aimed at normal incidence are used to sputter Ag(100) and Mo(100) samples. The total sputtering yield is larger for Ag(100) than for Mo(100). The ratio of sputtering yields is inversely proportional to the ratio of sublimation energies of these solids for projectiles between Ar20 and Ar250. In both systems, the angular distributions are sensitive to both the projectile size and the surface roughness. The maximum of angular spectra shifts from direction normal to the surface toward off-normal direction with the increase in the projectile size. An opposite trend is observed with the increase in the surface roughness. Formation of a cloud composed of projectile atoms and the enhanced lateral material relocation caused by projectile lateral expansion upon impact are the main factors responsible for promoting off-normal ejection. On the other hand, material ejection from randomly inclined surface areas and the influence of nearby topography are found to be responsible for enhancing ejection along the surface normal for rough surfaces.

Original languageEnglish (US)
Article number03H114
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Issue number3
StatePublished - May 2016

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry


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