Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Eui Hyeok Yang, Kirill Shcheglov, Susan Trolier-McKinstry

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane "transferred" in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.

Original languageEnglish (US)
Pages (from-to)271-278
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
EventMOEMS Display and Imaging Systems - San Jose, CA, United States
Duration: Jan 28 2003Jan 29 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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