Condensed phase equilibria in the metal-In-P systems

Ternary phase diagrams have proven valuable for understanding the reactions between a metal contact and a compound semiconductor, as well as for choosing thermally stable electrical contacts in thermodynamic equilibrium with the semiconductor. Since InP is important for both optoelectronic and electronic devices the metal-In-P systems are of particular interest. In this work, new portions of isothermal sections of the (Rh, Ir, Ru, Os)-In-P diagrams are presented. Then, since no compilation of the published metal-In-P phase diagrams is available, the diagrams are reviewed here. The features of these diagrams are discussed in terms of the thermodynamics of the metal-In-P systems particularly the considerable thermodynamic stability of many of the transition metal phosphides. Finally, some of the phases in thermodynamic equilibrium with InP, particularly PdIn and Ni₂P, are highlighted for their potential for high-temperature contacts to InP.