TY - GEN
T1 - Conductive silicone based MEMS sensor and actuator
AU - Huang, Adam
AU - Wong, Tak Sing
AU - Ho, Chih Ming
PY - 2005/11/9
Y1 - 2005/11/9
N2 - In this paper, we have demonstrated the fabrication and preliminary characterization of SU-8 patterned conductive silicone polymer MEMS sensor and actuator; in the form of a suspended cross-beam accelerometer and an electrostatic fluidic valve. By integrating our recently developed silicone/carbon black composite patterning technique with surface and bulk micromachining technologies, we have exploited the material properties of conductive silicone polymers for active/passive MEMS devices. The cross-beam dimensions of the accelerometer are 7mm × 400μm × 25μm with a 500μm × 500μm × 250μm silicon proof mass at the center. Various sizes of the silicone valves (2 electrodes) and pumps (3 electrodes) were fabricated, with the smallest design for the pump measuring 600μm × 3mm × 35μm. Further size reduction to yield pumps and valves in the order of a hundred micron is possible with our developed fabrication technique.
AB - In this paper, we have demonstrated the fabrication and preliminary characterization of SU-8 patterned conductive silicone polymer MEMS sensor and actuator; in the form of a suspended cross-beam accelerometer and an electrostatic fluidic valve. By integrating our recently developed silicone/carbon black composite patterning technique with surface and bulk micromachining technologies, we have exploited the material properties of conductive silicone polymers for active/passive MEMS devices. The cross-beam dimensions of the accelerometer are 7mm × 400μm × 25μm with a 500μm × 500μm × 250μm silicon proof mass at the center. Various sizes of the silicone valves (2 electrodes) and pumps (3 electrodes) were fabricated, with the smallest design for the pump measuring 600μm × 3mm × 35μm. Further size reduction to yield pumps and valves in the order of a hundred micron is possible with our developed fabrication technique.
UR - http://www.scopus.com/inward/record.url?scp=27544445438&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544445438&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2005.1497345
DO - 10.1109/SENSOR.2005.1497345
M3 - Conference contribution
AN - SCOPUS:27544445438
SN - 0780389948
SN - 9780780389946
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 1406
EP - 1411
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -