Abstract
Recently, there has been significant interest in use of (Ba,Sr)TiO3 (BST) thin films for tunable high frequency (RF and microwave) components. In a previous work we have shown that BST thin films grown by metalorganic chemical vapor deposition (MOCVD) exhibit films very low losses (as low as 0.003-0.004) and tunabilities over 50% at low operation voltages. In order to integrate BST thin films in tunable devices, the objectives of this work are : (i) study the effect of bottom and top electrode on the performance of thin film based capacitors, (ii) correlate low frequency (10 kHz) and high frequency (45 MHz - 1 GHz) measurements, (iii) separate the contribution of dielectric losses and metallic losses at both low and high frequency and finally (iv) show the potential usefulness of series capacitors structures.
Original language | English (US) |
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Pages (from-to) | 393-402 |
Number of pages | 10 |
Journal | Integrated Ferroelectrics |
Volume | 39 |
Issue number | 1-4 |
DOIs | |
State | Published - 2001 |
Event | 13th International Symposium on Integrated Ferroelectrics - Colorado Springs, CO, United States Duration: Mar 11 2006 → Mar 14 2006 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Ceramics and Composites
- Materials Chemistry
- Electrical and Electronic Engineering
- Control and Systems Engineering