Controlled fabrication of nanostructure material based chemical sensors

Laura J. Evans, Gary W. Hunter, Jennifer C. Xu, Gordon M. Berger, Randall L. Vander Wal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


In this paper, we report on a processing approach for a microsensor platform that incorporates nanorods in a controlled, efficient, and effective manner. Using mis novel approach of combining dielectrophoresis with standard microfabrication processing and materials, we have achieved reproducible, time-efficient fabrication of gas sensors with buried contacts to the tin oxide (SnO2) nanorods used for the detection of gases. The steps associated with this approach are described in detail. Semiconducting SnO2 nanorods are used to demonstrate this approach. The SnO2 nanorods succeeded as sensing elements for the detection of hydrogen (H2) and propylene (C3H6) up to 600°C, as well as the detection of nitrogen oxides (NOx) at 400°C This investigation shows the combination of nanorods and standard microfabrication processing materials resulting in a new technique for the fabrication of chemical microsensors using nanomaterials.

Original languageEnglish (US)
Title of host publicationFunctional Materials and Nanostructures for Chemical and Biochemical Sensing
PublisherMaterials Research Society
Number of pages6
ISBN (Print)9781605112305
StatePublished - Jan 1 2010

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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