Cryogenic motion performances of a piezoelectric single crystal micromotor

Xiaotian Li; Yuting Wu; Zhijiang Chen; Xiaoyong Wei; Haosu Luo; Shuxiang Dong

doi:10.1063/1.4870947

Cryogenic motion performances of a piezoelectric single crystal micromotor

Xiaotian Li, Yuting Wu, Zhijiang Chen, Xiaoyong Wei, Haosu Luo, Shuxiang Dong

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

This study investigates the cryogenic performances of a millimeter-size piezoelectric ultrasonic linear micromotor. The piezoelectric vibrator of the micromotor is made of Pb(In_1/2Nb_1/2)O₃ -Pb(Mg_1/3Nb_2/3)-PbTiO₃ single crystal and operated in first-bending wobbling mode. Experiments show that the piezoelectric single crystal micromotor works effectively even at extremely low temperature of -175 °C, although its resonance peaks vary with temperature significantly. This work confirms the feasibility of cryogenic operation of the piezo-micromotor, which is meaningful for aerospace or superconducting microwave application.

Original language	English (US)
Article number	144103
Journal	Journal of Applied Physics
Volume	115
Issue number	14
DOIs	https://doi.org/10.1063/1.4870947
State	Published - Apr 14 2014

All Science Journal Classification (ASJC) codes

General Physics and Astronomy

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title = "Cryogenic motion performances of a piezoelectric single crystal micromotor",

abstract = "This study investigates the cryogenic performances of a millimeter-size piezoelectric ultrasonic linear micromotor. The piezoelectric vibrator of the micromotor is made of Pb(In1/2Nb1/2)O3 -Pb(Mg1/3Nb2/3)-PbTiO3 single crystal and operated in first-bending wobbling mode. Experiments show that the piezoelectric single crystal micromotor works effectively even at extremely low temperature of -175 °C, although its resonance peaks vary with temperature significantly. This work confirms the feasibility of cryogenic operation of the piezo-micromotor, which is meaningful for aerospace or superconducting microwave application.",

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AU - Li, Xiaotian

AU - Wu, Yuting

AU - Chen, Zhijiang

AU - Wei, Xiaoyong

AU - Luo, Haosu

AU - Dong, Shuxiang

PY - 2014/4/14

Y1 - 2014/4/14

N2 - This study investigates the cryogenic performances of a millimeter-size piezoelectric ultrasonic linear micromotor. The piezoelectric vibrator of the micromotor is made of Pb(In1/2Nb1/2)O3 -Pb(Mg1/3Nb2/3)-PbTiO3 single crystal and operated in first-bending wobbling mode. Experiments show that the piezoelectric single crystal micromotor works effectively even at extremely low temperature of -175 °C, although its resonance peaks vary with temperature significantly. This work confirms the feasibility of cryogenic operation of the piezo-micromotor, which is meaningful for aerospace or superconducting microwave application.

AB - This study investigates the cryogenic performances of a millimeter-size piezoelectric ultrasonic linear micromotor. The piezoelectric vibrator of the micromotor is made of Pb(In1/2Nb1/2)O3 -Pb(Mg1/3Nb2/3)-PbTiO3 single crystal and operated in first-bending wobbling mode. Experiments show that the piezoelectric single crystal micromotor works effectively even at extremely low temperature of -175 °C, although its resonance peaks vary with temperature significantly. This work confirms the feasibility of cryogenic operation of the piezo-micromotor, which is meaningful for aerospace or superconducting microwave application.

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Cryogenic motion performances of a piezoelectric single crystal micromotor

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