Crystallographic wet chemical etching of p-type GaN

Keyphrases

• Chemical Etching 100%
• P-GaN 100%
• Etching Rate 80%
• Phosphoric Acid 60%
• Activation Energy 20%
• Undoped 20%
• Ethylene Glycol 20%
• Etchant 20%
• Arrhenius 20%
• N-GaN 20%
• Tetramethylammonium Hydroxide 20%
• Homojunction 20%
• High-resistivity GaN 20%
• Etching Solution 20%

Material Science

• Wet Etching 100%
• Electrical Resistivity 50%
• Activation Energy 50%