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Defects and electronic transport in hydrogenated amorphous SiC films of interest for low dielectric constant back end of the line dielectric systems

  • T. A. Pomorski
  • , B. C. Bittel
  • , C. J. Cochrane
  • , P. M. Lenahan
  • , J. Bielefeld
  • , S. W. King

Research output: Contribution to journal › Article › peer-review

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