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Dive into the research topics of 'Defects in Low-κ dielectrics and etch stop layers for use as interlay er dielectrics in ULSI'. Together they form a unique fingerprint.- Sort by
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Defects in Low-κ dielectrics and etch stop layers for use as interlay er dielectrics in ULSI
- B. C. Bittel
- , T. A. Pomorski
- , P. M. Lenahan
- , S. King
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Scopus
citations