Deposition of CVD-TiCN and TiAlN coatings guided with thermodynamic calculations

Liye Du; Shaoqing Wang; Yong Du; Lianchang Qiu; Zhuo Chen; Xiangming Chen; Zi Kui Liu; Cong Zhang

doi:10.3139/146.111613

Deposition of CVD-TiCN and TiAlN coatings guided with thermodynamic calculations

Liye Du, Shaoqing Wang, Yong Du, Lianchang Qiu, Zhuo Chen, Xiangming Chen, Zi Kui Liu, Cong Zhang

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

The chemical vapor deposition (CVD) of TiCN and TiAlN coatings was investigated through thermodynamics calculations and key experiments. Based on the established CVD phase diagrams, TiCN coating was prepared by the lowpressure CVD method. It was found that the measured atomic fractions of C, N and Ti in the TiCN coating agree reasonably with the calculation results. For the TiAlN coating, CVD phase diagrams suggest that the deposition temperature and the ratio of AlCl₃ to NH₃ could remarkably affect the Al content in the coating. The present work leads to a better agreement with the experimental data than the previous calculations for Al content in the TiAlN coating. It is expected that the current work is of interest for further experimental investigations on CVD hard coatings.

Original language	English (US)
Pages (from-to)	277-283
Number of pages	7
Journal	International Journal of Materials Research
Volume	109
Issue number	4
DOIs	https://doi.org/10.3139/146.111613
State	Published - Apr 2018

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Physical and Theoretical Chemistry
Metals and Alloys
Materials Chemistry

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@article{c7c2390018834ae8955aafa5548934e3,

title = "Deposition of CVD-TiCN and TiAlN coatings guided with thermodynamic calculations",

abstract = "The chemical vapor deposition (CVD) of TiCN and TiAlN coatings was investigated through thermodynamics calculations and key experiments. Based on the established CVD phase diagrams, TiCN coating was prepared by the lowpressure CVD method. It was found that the measured atomic fractions of C, N and Ti in the TiCN coating agree reasonably with the calculation results. For the TiAlN coating, CVD phase diagrams suggest that the deposition temperature and the ratio of AlCl3 to NH3 could remarkably affect the Al content in the coating. The present work leads to a better agreement with the experimental data than the previous calculations for Al content in the TiAlN coating. It is expected that the current work is of interest for further experimental investigations on CVD hard coatings.",

author = "Liye Du and Shaoqing Wang and Yong Du and Lianchang Qiu and Zhuo Chen and Xiangming Chen and Liu, {Zi Kui} and Cong Zhang",

note = "Funding Information: The financial support from Ministry of Industry and Information Technology of China (Grant No. 2015ZX04005008) is greatly acknowledged. Publisher Copyright: {\textcopyright} 2018 Carl Hanser Verlag. All rights reserved.",

year = "2018",

month = apr,

doi = "10.3139/146.111613",

language = "English (US)",

volume = "109",

pages = "277--283",

journal = "International Journal of Materials Research",

issn = "1862-5282",

publisher = "Walter de Gruyter GmbH",

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TY - JOUR

T1 - Deposition of CVD-TiCN and TiAlN coatings guided with thermodynamic calculations

AU - Du, Liye

AU - Wang, Shaoqing

AU - Du, Yong

AU - Qiu, Lianchang

AU - Chen, Zhuo

AU - Chen, Xiangming

AU - Liu, Zi Kui

AU - Zhang, Cong

N1 - Funding Information: The financial support from Ministry of Industry and Information Technology of China (Grant No. 2015ZX04005008) is greatly acknowledged. Publisher Copyright: © 2018 Carl Hanser Verlag. All rights reserved.

PY - 2018/4

Y1 - 2018/4

N2 - The chemical vapor deposition (CVD) of TiCN and TiAlN coatings was investigated through thermodynamics calculations and key experiments. Based on the established CVD phase diagrams, TiCN coating was prepared by the lowpressure CVD method. It was found that the measured atomic fractions of C, N and Ti in the TiCN coating agree reasonably with the calculation results. For the TiAlN coating, CVD phase diagrams suggest that the deposition temperature and the ratio of AlCl3 to NH3 could remarkably affect the Al content in the coating. The present work leads to a better agreement with the experimental data than the previous calculations for Al content in the TiAlN coating. It is expected that the current work is of interest for further experimental investigations on CVD hard coatings.

AB - The chemical vapor deposition (CVD) of TiCN and TiAlN coatings was investigated through thermodynamics calculations and key experiments. Based on the established CVD phase diagrams, TiCN coating was prepared by the lowpressure CVD method. It was found that the measured atomic fractions of C, N and Ti in the TiCN coating agree reasonably with the calculation results. For the TiAlN coating, CVD phase diagrams suggest that the deposition temperature and the ratio of AlCl3 to NH3 could remarkably affect the Al content in the coating. The present work leads to a better agreement with the experimental data than the previous calculations for Al content in the TiAlN coating. It is expected that the current work is of interest for further experimental investigations on CVD hard coatings.

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DO - 10.3139/146.111613

M3 - Article

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SN - 1862-5282

VL - 109

SP - 277

EP - 283

JO - International Journal of Materials Research

JF - International Journal of Materials Research

IS - 4

ER -

Deposition of CVD-TiCN and TiAlN coatings guided with thermodynamic calculations

Abstract

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