Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

Donald R. Gilbert; Melanie L. Carasso; Paul A. Demkowicz; Rajiv K. Singh; James H. Adair

doi:10.1007/s11664-997-0079-7

Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

Donald R. Gilbert, Melanie L. Carasso, Paul A. Demkowicz, Rajiv K. Singh, James H. Adair

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at low pressures (1.000 and 1.500 Torr) in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. Scanning electron microscopy and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density and gas-phase composition.

Original language	English (US)
Pages (from-to)	1326-1330
Number of pages	5
Journal	Journal of Electronic Materials
Volume	26
Issue number	11
DOIs	https://doi.org/10.1007/s11664-997-0079-7
State	Published - Nov 1997

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1007/s11664-997-0079-7

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title = "Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system",

abstract = "Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at low pressures (1.000 and 1.500 Torr) in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. Scanning electron microscopy and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density and gas-phase composition.",

author = "Gilbert, {Donald R.} and Carasso, {Melanie L.} and Demkowicz, {Paul A.} and Singh, {Rajiv K.} and Adair, {James H.}",

note = "Funding Information: The authors would like to acknowledge the financial support of the Engineering Research Center (ERC) for Particle Stience and Technology at the University of Florida, the National Science Foundation (NSF) grant #EEC-94-02989, and Lockheed Martin Corporation.",

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T1 - Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

AU - Gilbert, Donald R.

AU - Carasso, Melanie L.

AU - Demkowicz, Paul A.

AU - Singh, Rajiv K.

AU - Adair, James H.

N1 - Funding Information: The authors would like to acknowledge the financial support of the Engineering Research Center (ERC) for Particle Stience and Technology at the University of Florida, the National Science Foundation (NSF) grant #EEC-94-02989, and Lockheed Martin Corporation.

PY - 1997/11

Y1 - 1997/11

N2 - Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at low pressures (1.000 and 1.500 Torr) in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. Scanning electron microscopy and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density and gas-phase composition.

AB - Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at low pressures (1.000 and 1.500 Torr) in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. Scanning electron microscopy and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density and gas-phase composition.

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Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

Abstract

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