TY - GEN
T1 - Design and Characterization of Metalized Trench Based Waveguide Technology on Glass Interposer for 6G Applications
AU - Li, Xingchen
AU - Jia, Xiaofan
AU - Erdogan, Serhat
AU - Jordan, Matthew
AU - Swaminathan, Madhavan
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - This paper presents the demonstrations of D-band rectangular waveguides, cavity resonators and waveguide filters applying metalized trenches on glass interposer. The metalized trenches perform as side walls for the fully integrated waveguide structures. The proposed trench is created by laser drilling on the polymer dielectric and metalized through copper plating, which is compatible with the semi-additive patterning (SAP) process for glass interposer fabrication. Supported by the trenches, the designed waveguide shows a loss of 0.31 - 0.42 dB/mm over the D-band, the designed resonator has a loaded Q-factor of 86.13 at 140 GHz, and the designed filter performs an insertion loss of 1.75 dB at 140 GHz with 7.5 GHz 3-dB bandwidth.
AB - This paper presents the demonstrations of D-band rectangular waveguides, cavity resonators and waveguide filters applying metalized trenches on glass interposer. The metalized trenches perform as side walls for the fully integrated waveguide structures. The proposed trench is created by laser drilling on the polymer dielectric and metalized through copper plating, which is compatible with the semi-additive patterning (SAP) process for glass interposer fabrication. Supported by the trenches, the designed waveguide shows a loss of 0.31 - 0.42 dB/mm over the D-band, the designed resonator has a loaded Q-factor of 86.13 at 140 GHz, and the designed filter performs an insertion loss of 1.75 dB at 140 GHz with 7.5 GHz 3-dB bandwidth.
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U2 - 10.1109/IMS37964.2023.10188048
DO - 10.1109/IMS37964.2023.10188048
M3 - Conference contribution
AN - SCOPUS:85168554818
T3 - IEEE MTT-S International Microwave Symposium Digest
SP - 684
EP - 687
BT - 2023 IEEE/MTT-S International Microwave Symposium, IMS 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2023 IEEE/MTT-S International Microwave Symposium, IMS 2023
Y2 - 11 June 2023 through 16 June 2023
ER -