TY - GEN
T1 - Design and development of component-based equipment connectivity for semiconductor manufacturing
AU - Qiu, Robin
AU - Laplante, Phillip
PY - 2003
Y1 - 2003
N2 - In the Semiconductor Industry, the communication between a host application and equipment is performed using some standardized communication protocols, such as SECS I, SECS II, or GEM. However, specific equipment requirements and proprietary messages frequently make the equipment connectivity non-interoperable. By taking advantage of component software computing technology, a generic equipment integration interface called Component-based Equipment Connectivity (CEC) is proposed. CEC is designed as an assemblage of various customizable components, such as communication, message/control, and data repository. When these components are instantiated with equipment-dependent parameters, an operational CEC can be created for a specific type of GEM-compliant semiconductor equipment. Using XML as the data representation vehicle, communicated messages become language/platform independent and ease of integration is promoted.
AB - In the Semiconductor Industry, the communication between a host application and equipment is performed using some standardized communication protocols, such as SECS I, SECS II, or GEM. However, specific equipment requirements and proprietary messages frequently make the equipment connectivity non-interoperable. By taking advantage of component software computing technology, a generic equipment integration interface called Component-based Equipment Connectivity (CEC) is proposed. CEC is designed as an assemblage of various customizable components, such as communication, message/control, and data repository. When these components are instantiated with equipment-dependent parameters, an operational CEC can be created for a specific type of GEM-compliant semiconductor equipment. Using XML as the data representation vehicle, communicated messages become language/platform independent and ease of integration is promoted.
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U2 - 10.1109/icca.2003.1594985
DO - 10.1109/icca.2003.1594985
M3 - Conference contribution
AN - SCOPUS:24344473873
SN - 078037777X
SN - 9780780377776
T3 - International Conference on Control and Automation
SP - 63
EP - 67
BT - Fourth International Conference on Control and Automation
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - Fourth International Conference on Control and Automation
Y2 - 10 June 2003 through 12 June 2003
ER -