TY - JOUR
T1 - Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation
AU - Yao, Kui
AU - Zhu, Weiguang
AU - Uchino, Kenji
AU - Zhang, Zhe
AU - Lim, Leong Chew
N1 - Funding Information:
Manuscript received September 9, 1998; accepted December 16, 1998. The authors gratefully acknowledge the support of Data Storage Institute of Singapore. K. Yao is with the Institute of Materials Research and Engineering, Singapore 119260 and the Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798. His current address is A5 Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802 (e-mai1:k-yao@imre,org,sg). W. Zhu and Z. Zhang are with the Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798. K. Uchino is with the International Center for Actuators and Transducers, Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802. L. C. Lim is with the Institute of Materials Research and Engineering, Singapore 119260.
PY - 1999
Y1 - 1999
N2 - A new bending mode multimorph actuator was designed and fabricated successfully by a multiple screen printing process. Unlike the conventional bimorph actuator in which the bend occurs in the thickness direction, the bend in the multimorph actuator occurs in the widthwise direction because of synchronistical deformation of each single monolithic layer in the multilayer structure. The theoretical analysis and experimental measurements were conducted to study the performance of this type of actuator, and a comparison was made with the conventional bimorph actuator. Larger displacement, higher resonance frequency, and much larger blocking force could be achieved with the multimorph actuator than with a bimorph actuator of similar dimensions. The multimorph actuator presented in this paper provides a valuable alternative for actuator applications beyond those available with the popular bimorph and longitudinal multilayer actuators.
AB - A new bending mode multimorph actuator was designed and fabricated successfully by a multiple screen printing process. Unlike the conventional bimorph actuator in which the bend occurs in the thickness direction, the bend in the multimorph actuator occurs in the widthwise direction because of synchronistical deformation of each single monolithic layer in the multilayer structure. The theoretical analysis and experimental measurements were conducted to study the performance of this type of actuator, and a comparison was made with the conventional bimorph actuator. Larger displacement, higher resonance frequency, and much larger blocking force could be achieved with the multimorph actuator than with a bimorph actuator of similar dimensions. The multimorph actuator presented in this paper provides a valuable alternative for actuator applications beyond those available with the popular bimorph and longitudinal multilayer actuators.
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U2 - 10.1109/58.775669
DO - 10.1109/58.775669
M3 - Article
C2 - 18238507
AN - SCOPUS:0032671067
SN - 0885-3010
VL - 46
SP - 1020
EP - 1027
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 4
ER -