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Design and fabrication of a lead zirconate titanate (PZT) thin film acoustic sensor

  • R. G. Polcawich
  • , M. Scanlon
  • , J. Pulskamp
  • , J. Clarkson
  • , J. Conrad
  • , D. Washington
  • , R. Piekarz
  • , S. Trolier-Mckinstry
  • , M. Dubey

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