Abstract
The fabrication of microminiature thermocouples for use with infrared radiation detectors is discussed and illustrated with some practical devices. In particular, the use of free-standing wires to achieve thermal isolation between the hot and cold junctions is described. This results in a well defined hot junction with small thermal capacity, thereby increasing the temperature rise for a given power input and so improving the sensitivity of the detector. Initial measurements of the performance of this device are presented.
Original language | English (US) |
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Pages (from-to) | 83-86 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 11 |
Issue number | 1-4 |
DOIs | |
State | Published - Apr 1990 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering