Design and fabrication of a novel MEMS device for high resolution force and displacement measurement

Keyphrases

• High-resolution 100%
• MEMS Devices 100%
• Forced Displacement 100%
• Displacement Measurement 100%
• Force Measurement 100%
• Material Characterization 50%
• In Situ 50%
• Visual Inspection 50%
• Optical Microscope 50%
• Attenuation 50%
• Sensing Mechanism 50%
• Carbon Nanotubes 50%
• Loading Device 50%
• Displacement Resolution 50%
• Nanoscale Thin Films 50%
• Polymer Interface 50%
• Quantitative Measurement 50%
• SEM-TEM 50%
• Biological Cells 50%
• Mechanical Testing 50%
• Displacement Sensing 50%
• Complex Displacement 50%
• Piconewton 50%
• Displacement Sensor 50%
• Structural Stiffness 50%

Engineering

• High Resolution 100%
• Microelectromechanical System 100%
• Buckling 100%
• Displacement Measurement 100%
• Transmissions 50%
• Nanometre 50%
• Thin Films 50%
• Visual Inspection 50%
• Nanoscale 50%
• Scanning Tunneling Microscopy 50%
• Sensing Mechanisms 50%
• Carbon Nanotube 50%
• Loading Device 50%
• Tunnel Construction 50%
• Force Displacement 50%
• Optical Microscope 50%
• Mechanical Testing 50%
• Displacement Sensor 50%
• Newton (Force) 50%

Material Science

• Microelectromechanical System 100%
• Silicon 50%
• Thin Films 50%
• Carbon Nanotube 50%
• Scanning Electron Microscopy 50%
• Mechanical Testing 50%