Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker; Tianning Liu; Mohit Tendulkar; David N. Burrows; Casey T. Deroo; Ryan Allured; Edward N. Hertz; Vincenzo Cotroneo; Paul B. Reid; Eric D. Schwartz; Thomas N. Jackson; Susan Trolier-Mckinstry

doi:10.1364/OE.26.027757

Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker, Tianning Liu, Mohit Tendulkar, David N. Burrows, Casey T. Deroo, Ryan Allured, Edward N. Hertz, Vincenzo Cotroneo, Paul B. Reid, Eric D. Schwartz, Thomas N. Jackson, Susan Trolier-Mckinstry

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb_0.995(Zr_0.52Ti_0.48)_0.99Nb_0.01O₃) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

Original language	English (US)
Pages (from-to)	27757-27772
Number of pages	16
Journal	Optics Express
Volume	26
Issue number	21
DOIs	https://doi.org/10.1364/OE.26.027757
State	Published - Oct 15 2018

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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10.1364/OE.26.027757

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title = "Design and fabrication of prototype piezoelectric adjustable X-ray mirrors",

abstract = "Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.",

author = "Julian Walker and Tianning Liu and Mohit Tendulkar and Burrows, {David N.} and Deroo, {Casey T.} and Ryan Allured and Hertz, {Edward N.} and Vincenzo Cotroneo and Reid, {Paul B.} and Schwartz, {Eric D.} and Jackson, {Thomas N.} and Susan Trolier-Mckinstry",

note = "Publisher Copyright: {\textcopyright} 2018 Optical Society of America.",

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doi = "10.1364/OE.26.027757",

language = "English (US)",

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T1 - Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

AU - Walker, Julian

AU - Liu, Tianning

AU - Tendulkar, Mohit

AU - Burrows, David N.

AU - Deroo, Casey T.

AU - Allured, Ryan

AU - Hertz, Edward N.

AU - Cotroneo, Vincenzo

AU - Reid, Paul B.

AU - Schwartz, Eric D.

AU - Jackson, Thomas N.

AU - Trolier-Mckinstry, Susan

PY - 2018/10/15

Y1 - 2018/10/15

N2 - Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

AB - Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

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JO - Optics Express

JF - Optics Express

IS - 21

ER -

Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Abstract

All Science Journal Classification (ASJC) codes

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