Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker; Tianning Liu; Mohit Tendulkar; David N. Burrows; Casey T. Deroo; Ryan Allured; Edward N. Hertz; Vincenzo Cotroneo; Paul B. Reid; Eric D. Schwartz; Thomas N. Jackson; Susan Trolier-Mckinstry

doi:10.1364/OE.26.027757

Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Julian Walker
, Tianning Liu
, Mohit Tendulkar
, David N. Burrows
, Casey T. Deroo
, Ryan Allured
, Edward N. Hertz
, Vincenzo Cotroneo
, Paul B. Reid
, Eric D. Schwartz
, Thomas N. Jackson
, Susan Trolier-Mckinstry

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb_0.995(Zr_0.52Ti_0.48)_0.99Nb_0.01O₃) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

Original language	English (US)
Pages (from-to)	27757-27772
Number of pages	16
Journal	Optics Express
Volume	26
Issue number	21
DOIs	https://doi.org/10.1364/OE.26.027757
State	Published - Oct 15 2018

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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10.1364/OE.26.027757

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@article{1bf68788a2da473398904eac8509b712,

title = "Design and fabrication of prototype piezoelectric adjustable X-ray mirrors",

abstract = "Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100\% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.",

author = "Julian Walker and Tianning Liu and Mohit Tendulkar and Burrows, \{David N.\} and Deroo, \{Casey T.\} and Ryan Allured and Hertz, \{Edward N.\} and Vincenzo Cotroneo and Reid, \{Paul B.\} and Schwartz, \{Eric D.\} and Jackson, \{Thomas N.\} and Susan Trolier-Mckinstry",

note = "Publisher Copyright: {\textcopyright} 2018 Optical Society of America.",

year = "2018",

month = oct,

day = "15",

doi = "10.1364/OE.26.027757",

language = "English (US)",

volume = "26",

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TY - JOUR

T1 - Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

AU - Walker, Julian

AU - Liu, Tianning

AU - Tendulkar, Mohit

AU - Burrows, David N.

AU - Deroo, Casey T.

AU - Allured, Ryan

AU - Hertz, Edward N.

AU - Cotroneo, Vincenzo

AU - Reid, Paul B.

AU - Schwartz, Eric D.

AU - Jackson, Thomas N.

AU - Trolier-Mckinstry, Susan

PY - 2018/10/15

Y1 - 2018/10/15

N2 - Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

AB - Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb0.995(Zr0.52Ti0.48)0.99Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing.

UR - https://www.scopus.com/pages/publications/85055017191

UR - https://www.scopus.com/pages/publications/85055017191#tab=citedBy

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DO - 10.1364/OE.26.027757

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AN - SCOPUS:85055017191

SN - 1094-4087

VL - 26

SP - 27757

EP - 27772

JO - Optics Express

JF - Optics Express

IS - 21

ER -

Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

Abstract

All Science Journal Classification (ASJC) codes

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