Design and modeling of a MEMS pico-Newton loading/sensing device

B. A. Samuel; A. V. Desai; M. A. Haque

doi:10.1016/j.sna.2005.11.018

Design and modeling of a MEMS pico-Newton loading/sensing device

B. A. Samuel
, A. V. Desai
, M. A. Haque

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

Original language	English (US)
Pages (from-to)	155-162
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	127
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2005.11.018
State	Published - Feb 28 2006

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/j.sna.2005.11.018

Cite this

@article{6d3904b995aa40a083ba164443d705e3,

title = "Design and modeling of a MEMS pico-Newton loading/sensing device",

abstract = "In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.",

author = "Samuel, \{B. A.\} and Desai, \{A. V.\} and Haque, \{M. A.\}",

note = "Funding Information: We acknowledge support from NSF (CMS-0411603) for this research. The devices were fabricated at the Penn State Nanofabrication Facility, a member of the NSF's National Nanofabrication Users Network. ",

year = "2006",

month = feb,

day = "28",

doi = "10.1016/j.sna.2005.11.018",

language = "English (US)",

volume = "127",

pages = "155--162",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Design and modeling of a MEMS pico-Newton loading/sensing device

AU - Samuel, B. A.

AU - Desai, A. V.

AU - Haque, M. A.

N1 - Funding Information: We acknowledge support from NSF (CMS-0411603) for this research. The devices were fabricated at the Penn State Nanofabrication Facility, a member of the NSF's National Nanofabrication Users Network.

PY - 2006/2/28

Y1 - 2006/2/28

N2 - In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

AB - In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

UR - https://www.scopus.com/pages/publications/32844471516

UR - https://www.scopus.com/pages/publications/32844471516#tab=citedBy

U2 - 10.1016/j.sna.2005.11.018

DO - 10.1016/j.sna.2005.11.018

M3 - Article

AN - SCOPUS:32844471516

SN - 0924-4247

VL - 127

SP - 155

EP - 162

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1

ER -

Design and modeling of a MEMS pico-Newton loading/sensing device

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this