Design and performance of an energy- and angle-resolved secondary ion mass spectrometer

Keyphrases

• Secondary Ion Mass Spectrometer 100%
• Secondary Ion 100%
• Energy-resolved 100%
• Adsorbate 50%
• Energy Analysis 50%
• Angle Section 50%
• Bandpass 50%
• Low Energy Electron Diffraction 50%
• Quadrupole Mass Filter 50%
• Vacuum Condition 50%
• Collection Angle 50%

Engineering

• Axis Parallel 33%
• Primary Ion 33%
• Provide Beam 33%
• Adsorbate 33%

Chemistry

• Low Energy Electron Diffraction 25%