DESIGN AND ULTRASONIC CHARACTERIZATION OF A THIN-FILM, FLEXIBLE, PMUT ARRAY

Jeong Nyeon Kim, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-Mckinstry, Richard L. Tutwiler, Judith A. Todd

Research output: Contribution to specialist publicationArticle

Abstract

This article discussed how a FEA approach could improve designs for robust and practical PMUT sensor array construction. PMUT array performance characteristics beyond those discussed in this article can determine: undesirable PMUT modal distortions; 3D beam profiles, depth of field and sharpness of acoustic wave propagation.

Original languageEnglish (US)
Pages15-20
Number of pages6
Volume178
No8
Specialist publicationAdvanced Materials and Processes
DOIs
StatePublished - Nov 1 2020

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering

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