Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers

Keyphrases

• High Sensitivity 100%
• Accelerometer 100%
• Piezoelectric Lead Zirconate Titanate 100%
• Microelectromechanical Systems (MEMS) Accelerometer 100%
• Crystallization 50%
• Excellent Sensitivity 50%
• Integrated Circuits 50%
• Piezoelectric Properties 50%
• Dielectric Properties 50%
• Spin Coating 50%
• Si Substrate 50%
• Good Temperature Stability 50%
• Resonant Frequency 50%
• Telemetry System 50%
• Thick Film 50%
• Pyrolysis 50%
• Proof Mass 50%
• Lead Zirconate Titanate Thin Films 50%
• Acetylacetonate 50%
• Deep Reactive Ion Etching 50%
• One-axis 50%
• Mass Fabrication 50%
• Bulk Micromachining 50%
• Sensitivity Range 50%
• Sol-gel Solution 50%
• Modified Sol-gel 50%
• RF Telemetry 50%
• Wireless Monitoring 50%
• Transverse Sensitivity 50%
• Diaphragm Structure 50%
• Industrial Equipment 50%

Engineering

• Piezoelectric 100%
• Microelectromechanical System 100%
• Titanate 50%
• Lead Zirconate 50%
• Diaphragm 25%
• Dielectrics 25%
• Si Substrate 25%
• Telemetry System 25%
• Pyrolysis 25%
• Resonant Frequency 25%
• Proof Mass 25%
• Temperature Stability 25%
• Micro Machining 25%
• Deep Reactive Ion Etching 25%
• Networks (Circuits) 25%
• Industrial Equipment 25%

Material Science

• Piezoelectricity 100%
• Microelectromechanical System 100%
• Accelerometer 100%
• Film 50%
• Lead Zirconate Titanate 50%
• Electronic Circuit 25%
• Dielectric Property 25%
• Piezoelectric Property 25%
• Sol-Gel 25%
• Spin Coating 25%
• Thick Films 25%
• Reactive Ion Etching 25%
• Micromachining 25%