Design framework for high-speed 3D scanning tools and development of an axial focusing micromirror-based array

Nathan Tessema Ersumo, Cem Yalcin, Nick Antipa, Nicolas Pégard, Laura Waller, Daniel Lopez, Rikky Muller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Rapid 3D optical scanning of points or patterned light is widely employed across applications in microscopy, material processing, adaptive optics and surveying. Despite this broadness in applicability, embodiments of 3D scanning tools may vary considerably as a result of the specific performance needs of each application. We present here a micromirror arraybased modular framework for the systemic design of such high-speed scanning tools. Our framework combines a semicustom commercial fabrication process with a comprehensive simulation pipeline in order to optimally reconfigure pixel wiring schemes across specific applications for the efficient allocation of available degrees of freedom. As a demonstration of this framework and to address existing bottlenecks in axial focusing, we produced a 32-ring concentric micromirror array capable of performing random-access focusing for wavelengths of up to 1040 nm at a response rate of 8.75 kHz. By partitioning the rings into electrostatically driven piston-mode pixels, we are able to operate the array through simple openloop 30 V drive, minimizing insertion complexity, and to ensure stable operation by preventing torsional failure and curling from stress. Furthermore, by taking advantage of phase-wrapping and the 32 degrees of freedom afforded by the number of independently addressable rings, we achieve good axial resolvability across the tool's operating range with an axial fullwidth- half-maximum to range ratio of 3.5% as well as the ability to address focus depth-dependent aberrations resulting from the optical system or sample under study.

Original languageEnglish (US)
Title of host publicationMOEMS and Miniaturized Systems XIX
EditorsWibool Piyawattanametha, Wibool Piyawattanametha, Yong-Hwa Park, Hans Zappe
ISBN (Electronic)9781510633490
StatePublished - 2020
EventMOEMS and Miniaturized Systems XIX 2020 - San Francisco, United States
Duration: Feb 1 2020Feb 3 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceMOEMS and Miniaturized Systems XIX 2020
Country/TerritoryUnited States
CitySan Francisco

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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