TY - GEN
T1 - Design, manufacture, and testing of nanometer-level spindle metrology testballs
AU - Knapp, Byron R.
AU - Arneson, David A.
AU - Liebers, Melvin J.
AU - Marsh, Eric R.
AU - Keller, Eric E.
PY - 2011
Y1 - 2011
N2 - Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.
AB - Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.
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M3 - Conference contribution
AN - SCOPUS:84884317248
SN - 9781887706582
T3 - Proceedings - ASPE 2011 Annual Meeting
SP - 495
EP - 498
BT - Proceedings - ASPE 2011 Annual Meeting
T2 - 26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011
Y2 - 13 November 2011 through 18 November 2011
ER -