Design, manufacture, and testing of nanometer-level spindle metrology testballs

Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Eric R. Marsh, Eric E. Keller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.

Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2011 Annual Meeting
Pages495-498
Number of pages4
StatePublished - 2011
Event26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 - Denver, CO, United States
Duration: Nov 13 2011Nov 18 2011

Publication series

NameProceedings - ASPE 2011 Annual Meeting
Volume52

Other

Other26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011
Country/TerritoryUnited States
CityDenver, CO
Period11/13/1111/18/11

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

Fingerprint

Dive into the research topics of 'Design, manufacture, and testing of nanometer-level spindle metrology testballs'. Together they form a unique fingerprint.

Cite this