Design Methods for 3D Membrane Projection Lithography Metasurface Unit Cells

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Three dimensional metasurface structures hold the potential for better performing devices and interesting new properties. However, at optical frequencies it is very difficult to fabricate truly three dimensional designs. One of the most promising techniques is Membrane Projection Lithography (MPL), which can allow for dielectric and metallic inclusions to be deposited on the side wall of a cavity. However, the design process is difficult due to the large search space afforded by these 3D structures and the many coupling environments that arise between neighboring unit cells. Fortunately, advanced optimization techniques have been developed that allow for the space to be fully explored in an efficient manner for optimal designs.

Original languageEnglish (US)
Title of host publication2020 14th International Congress on Artificial Materials for Novel Wave Phenomena, Metamaterials 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages468-470
Number of pages3
ISBN (Electronic)9781728161044
DOIs
StatePublished - Sep 27 2020
Event14th International Congress on Artificial Materials for Novel Wave Phenomena, Metamaterials 2020 - New York City, United States
Duration: Sep 27 2020Oct 3 2020

Publication series

Name2020 14th International Congress on Artificial Materials for Novel Wave Phenomena, Metamaterials 2020

Conference

Conference14th International Congress on Artificial Materials for Novel Wave Phenomena, Metamaterials 2020
Country/TerritoryUnited States
CityNew York City
Period9/27/2010/3/20

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Acoustics and Ultrasonics
  • Atomic and Molecular Physics, and Optics
  • Radiation

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