Design of a shallow thermally stable ohmic contact to p-type InGaSb

S. H. Wang; S. E. Mohney; B. A. Hull; B. R. Bennett

doi:10.1116/1.1545731

Design of a shallow thermally stable ohmic contact to p-type InGaSb

S. H. Wang, S. E. Mohney, B. A. Hull, B. R. Bennett

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	633-640
Number of pages	8
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1545731
State	Published - 2003

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1545731

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title = "Design of a shallow thermally stable ohmic contact to p-type InGaSb",

author = "Wang, {S. H.} and Mohney, {S. E.} and Hull, {B. A.} and Bennett, {B. R.}",

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AU - Mohney, S. E.

AU - Hull, B. A.

AU - Bennett, B. R.

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 2

ER -

Design of a shallow thermally stable ohmic contact to p-type InGaSb

All Science Journal Classification (ASJC) codes

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