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Design of a shallow thermally stable ohmic contact to p-type InGaSb

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)633-640
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number2
DOIs
StatePublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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